Invention Grant
- Patent Title: Apparatus of repairing transistor
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Application No.: US16747236Application Date: 2020-01-20
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Publication No.: US10802364B2Publication Date: 2020-10-13
- Inventor: Chung-Kuang Chien
- Applicant: HKC Corporation Limited , Chongqing HKC Optoelectronics Technology Co., ltd.
- Applicant Address: CN Shenzhen CN Chongqing
- Assignee: HKC CORPORATION LIMITED,CHONGQING HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: HKC CORPORATION LIMITED,CHONGQING HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Shenzhen CN Chongqing
- Agency: WPAT, PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5d584da7
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G02F1/1362 ; H01L29/786 ; H01L29/66 ; G09G3/36

Abstract:
An apparatus of repairing a transistor, for repairing a short-circuit defect of a metal layer between a source and a drain of a thin film transistor; the transistor repairing apparatus including: an acquiring equipment, for acquiring a short-circuit region of a metal layer between a source and a drain of a thin film transistor; and an etching equipment, for etching the short-circuit region.
Public/Granted literature
- US20200150501A1 APPARATUS OF REPAIRING TRANSISTOR Public/Granted day:2020-05-14
Information query
IPC分类: