Apparatus of repairing transistor
Abstract:
An apparatus of repairing a transistor, for repairing a short-circuit defect of a metal layer between a source and a drain of a thin film transistor; the transistor repairing apparatus including: an acquiring equipment, for acquiring a short-circuit region of a metal layer between a source and a drain of a thin film transistor; and an etching equipment, for etching the short-circuit region.
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