Invention Grant
- Patent Title: Induced warpage of a thermal conductor
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Application No.: US16544097Application Date: 2019-08-19
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Publication No.: US10804168B2Publication Date: 2020-10-13
- Inventor: Jerrod Peterson , David Pidwerbecki
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Patent Capital Group
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/02 ; H01L23/34 ; H01L23/36 ; H01L23/42 ; H01L23/433

Abstract:
Particular embodiments described herein provide for a silicon layer, where the silicon layer includes a profile and a thermal conductor coupled to the silicon layer, where the thermal conductor includes one or more residual stresses. The thermal conductor is modified based on the one or more residual stress such that when pressure is applied to the thermal conductor, a profile of the thermal conductor at least approximately matches the profile of the silicon layer. In an example, the thermal conductor is modified by removing material from one or more areas of the thermal conductor and the thermal conductor is coupled to the silicon layer by one or more pressure inducing mechanisms.
Public/Granted literature
- US20190371683A1 INDUCED WARPAGE OF A THERMAL CONDUCTOR Public/Granted day:2019-12-05
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