- Patent Title: High density programmable e-fuse co-integrated with vertical FETs
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Application No.: US16437383Application Date: 2019-06-11
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Publication No.: US10804278B2Publication Date: 2020-10-13
- Inventor: Karthik Balakrishnan , Michael A. Guillorn , Pouya Hashemi , Alexander Reznicek
- Applicant: ELPIS TECHNOLOGIES INC.
- Applicant Address: CA
- Assignee: ELPIS TECHNOLOGIES INC.
- Current Assignee: ELPIS TECHNOLOGIES INC.
- Current Assignee Address: CA
- Agency: Tutujian & Bitetto, P.C.
- Main IPC: H01L23/525
- IPC: H01L23/525 ; H01L29/78 ; H01L27/112 ; H01L29/423 ; H01L29/786 ; H01L29/66 ; H01L29/06 ; H01L21/762 ; H01L27/06 ; H01L21/84

Abstract:
A method for integrating vertical transistors and electric fuses includes forming fins through a dielectric layer and a dummy gate stack on a substrate; thinning top portions of the fins by an etch process; epitaxially growing top source/drain regions on thinned portions of the fins in a transistor region and top cathode/anode regions on the thinned portions of the fins in a fuse region; and removing the dummy gate layer and exposing sidewalls of the fins. The fuse region is blocked to form a gate structure in the transistor region. The transistor region is blocked and the fuse region is exposed to conformally deposit a metal on exposed sidewalls of the fins. The metal is annealed to form silicided fins. Portions of the substrate are separated to form bottom source/drain regions for vertical transistors in the transistor region and bottom cathode/anode regions for fuses in the fuse region.
Public/Granted literature
- US20190312044A1 HIGH DENSITY PROGRAMMABLE E-FUSE CO-INTEGRATED WITH VERTICAL FETS Public/Granted day:2019-10-10
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