Invention Grant
- Patent Title: Gate-all-around field effect transistor and method for manufacturing same
-
Application No.: US16181630Application Date: 2018-11-06
-
Publication No.: US10804372B2Publication Date: 2020-10-13
- Inventor: Poren Tang
- Applicant: Semiconductor Manufacturing International (Beijing) Corporation , SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Applicant Address: CN Beijing CN Shanghai
- Assignee: Semiconductor Manufacturing (Beijing) International Corporation,Semiconductor Manufacturing (Shanghai) International Corporation
- Current Assignee: Semiconductor Manufacturing (Beijing) International Corporation,Semiconductor Manufacturing (Shanghai) International Corporation
- Current Assignee Address: CN Beijing CN Shanghai
- Agency: Brinks Gilson & Lione
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@ebb5c63
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/306 ; H01L29/08 ; H01L29/06 ; H01L29/423 ; H01L29/78 ; H01L29/786

Abstract:
This application discloses a gate-all-around field effect transistor and a method for manufacturing same. In some implementations the method may include: forming a first fin structure on a substrate, where each first fin structure includes one first laminated structure, where the first laminated structure sequentially includes a sacrificial layer, a support layer, and a channel layer from bottom to top; forming a dummy gate structure across the first fin structure, where the dummy gate structure includes a dummy gate dielectric layer, a dummy gate on the dummy gate dielectric layer, and a first spacer on a side surface of the dummy gate; removing parts of the first fin structure located on two sides of the dummy gate structure, to form a second fin structure; performing first etching on a side surface of the sacrificial layer in the second fin structure, to form a first space; forming a second spacer in the first space; performing second etching on a side surface of the channel layer in the second fin structure, to form a second space; and performing selective epitaxy on the side surface of the channel layer in the second fin structure, to form a source region and a drain region, where along a direction of a channel, compared with a side surface, distal to the sacrificial layer, of the second spacer, the side surface of the channel layer after the second etching is closer to the sacrificial layer.
Public/Granted literature
- US20190181241A1 GATE-ALL-AROUND FIELD EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING SAME Public/Granted day:2019-06-13
Information query
IPC分类: