Invention Grant
- Patent Title: Method of forming wrap-around-contact and the resulting device
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Application No.: US16160701Application Date: 2018-10-15
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Publication No.: US10804398B2Publication Date: 2020-10-13
- Inventor: Julien Frougier , Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P. C.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/8234 ; H01L21/768 ; H01L29/66

Abstract:
A device including source-drain epitaxy contacts with a trench silicide (TS) liner wrapped around the source-drain contacts, and method of production thereof. Embodiments include a device having a gate structure formed over a substrate; source-drain epitaxy contacts including a trench silicide (TS) liner covering the source-drain epitaxy contacts; TS contacts formed on the TS liner over the source-drain epitaxy contacts; and a dielectric pillar disposed in a TS cut between the source-drain epitaxy contacts. The TS liner wraps around the source-drain epitaxy contacts, including bottom negatively tapered surfaces of the source-drain epitaxy contacts.
Public/Granted literature
- US20200119180A1 METHOD OF FORMING WRAP-AROUND-CONTACT AND THE RESULTING DEVICE Public/Granted day:2020-04-16
Information query
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