Invention Grant
- Patent Title: Structure and method for FinFET device with contact over dielectric gate
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Application No.: US16734968Application Date: 2020-01-06
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Publication No.: US10804401B2Publication Date: 2020-10-13
- Inventor: Fang Chen , Jhon Jhy Liaw
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/78 ; H01L21/321 ; H01L29/45 ; H01L29/40 ; H01L29/417 ; H01L21/8234 ; H01L29/66 ; H01L21/762 ; H01L21/768 ; H01L27/088 ; H01L23/528 ; H01L23/522 ; H01L29/423 ; H01L29/165 ; H01L29/49 ; H01L29/51 ; H01L23/532 ; H01L21/3105 ; H01L21/311

Abstract:
The present disclosure provides one embodiment of a semiconductor structure. The semiconductor structure includes a first active region and a second fin active region extruded from a semiconductor substrate; an isolation featured formed in the semiconductor substrate and being interposed between the first and second fin active regions; a dielectric gate disposed on the isolation feature; a first gate stack disposed on the first fin active region and a second gate stack disposed on the second fin active region; a first source/drain feature formed in the first fin active region and interposed between the first gate stack and the dielectric gate; a second source/drain feature formed in the second fin active region and interposed between the second gate stack and the dielectric gate; a contact feature formed in a first inter-level dielectric material layer and landing on the first and second source/drain features and extending over the dielectric gate.
Public/Granted literature
- US20200152782A1 Structure and Method for FinFET Device with Contact Over Dielectric Gate Public/Granted day:2020-05-14
Information query
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