Invention Grant
- Patent Title: Plasma processing apparatus and plasma processing method
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Application No.: US16228934Application Date: 2018-12-21
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Publication No.: US10811231B2Publication Date: 2020-10-20
- Inventor: Tooru Aramaki , Kenetsu Yokogawa , Masaru Izawa
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6912a307
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/311

Abstract:
A plasma processing apparatus or a plasma processing method that processes a wafer to be processed, which is placed on a surface of a sample stage arranged in a processing chamber inside a vacuum container, using a plasma formed in the processing chamber, the apparatus or method including processing the wafer by adjusting a first high-frequency power to be supplied to a first electrode arranged inside the sample stage and a second high-frequency power to be supplied, via a resonant circuit, to a second electrode which is arranged in an inner side of a ring-shaped member made of a dielectric arranged on an outer peripheral side of a surface of the sample stage on which the wafer is placed, during the processing.
Public/Granted literature
- US20190122864A1 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Public/Granted day:2019-04-25
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