Invention Grant
- Patent Title: Wafer container and method for holding wafer
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Application No.: US15884343Application Date: 2018-01-30
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Publication No.: US10811291B2Publication Date: 2020-10-20
- Inventor: Wei-Kang Liu , Chi-Chung Jen , Jui-Ming Huang , Wan-Ting Liao
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/673
Abstract:
Provided is a wafer container including a frame and at least a pair of the stents. The frame has opposite sidewalls. The at least a pair of the stents is respectively disposed on the sidewalls of the frame, wherein the at least a pair of the stents is configured to provide at least three supporting points to support at least one wafer. A method for holding at least one wafer is also provided.
Public/Granted literature
- US20190139792A1 WAFER CONTAINER AND METHOD FOR HOLDING WAFER Public/Granted day:2019-05-09
Information query
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