Invention Grant
- Patent Title: Semiconductor devices having crack-inhibiting structures
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Application No.: US16236143Application Date: 2018-12-28
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Publication No.: US10811365B2Publication Date: 2020-10-20
- Inventor: Shams U. Arifeen , Hyunsuk Chun , Sheng Wei Yang , Keizo Kawakita
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
Semiconductor devices having metallization structures including crack-inhibiting structures, and associated systems and methods, are disclosed herein. In one embodiment, a semiconductor device includes a metallization structure formed over a semiconductor substrate. The metallization structure can include a bond pad electrically coupled to the semiconductor substrate via one or more layers of conductive material, and an insulating material—such as a low-κ dielectric material—at least partially around the conductive material. The metallization structure can further include a crack-inhibiting structure positioned beneath the bond pad between the bond pad and the semiconductor substrate. The crack-inhibiting structure can include (a) a metal lattice extending laterally between the bond pad and the semiconductor substrate and (b) barrier members extending vertically between the metal lattice and the bond pad.
Public/Granted literature
- US20200211982A1 SEMICONDUCTOR DEVICES HAVING CRACK-INHIBITING STRUCTURES Public/Granted day:2020-07-02
Information query
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