Invention Grant
- Patent Title: Closed loop accelerometer
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Application No.: US15854008Application Date: 2017-12-26
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Publication No.: US10816568B2Publication Date: 2020-10-27
- Inventor: Lisa Koenigsberg , Boris Grinberg , Aviram Feingold , Roza Wolfson
- Applicant: PHYSICAL LOGIC LTD.
- Applicant Address: IL Petah Tikva
- Assignee: PHYSICAL LOGIC LTD.
- Current Assignee: PHYSICAL LOGIC LTD.
- Current Assignee Address: IL Petah Tikva
- Agency: Roach, Brown, McCarthy & Gruber, P.C.
- Agent Kevin D. McCarthy
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/13

Abstract:
A micro-mechanical electrical systems (MEMS) type accelerometer for measuring vibration and movement employs a closed loop measurement mode. The accelerometer comprises at least one capacitive section configured as a sensing section and at least one capacitive section configured as an actuator section. In embodiments of the accelerometer capacitor plates are arranged in a bilateral structure in both the sensing and actuator sections. This structure combined with the capacitive feedback provided by the closed loop operation and other features of the device allow for a much larger sensing range in addition to other advantages over presently available MEMS accelerometers.
Public/Granted literature
- US20190195909A1 CLOSED LOOP ACCELEROMETER Public/Granted day:2019-06-27
Information query
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