Invention Grant
- Patent Title: Self aligned replacement metal source/drain finFET
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Application No.: US16459685Application Date: 2019-07-02
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Publication No.: US10818759B2Publication Date: 2020-10-27
- Inventor: Emre Alptekin , Robert R. Robison , Reinaldo A. Vega
- Applicant: TESSERA, INC.
- Applicant Address: US CA San Jose
- Assignee: Tessera, Inc.
- Current Assignee: Tessera, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/66 ; H01L29/40 ; H01L29/06 ; H01L29/45 ; H01L29/78

Abstract:
A fin-shaped field effect transistor (finFET) device comprising includes a substrate. an insulating layer displaced over the substrate, and a fin. The device also includes a gate formed over the fin, the gate including: a gate stack; and a high-k dielectric on opposing side of the gate stack. The device further includes metallic source and drain regions formed over the fin and on opposing sides of the gate.
Public/Granted literature
- US20190326406A1 SELF ALIGNED REPLACEMENT METAL SOURCE/DRAIN FINFET Public/Granted day:2019-10-24
Information query
IPC分类: