Invention Grant
- Patent Title: Packaged pressure sensor device
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Application No.: US15787150Application Date: 2017-10-18
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Publication No.: US10822224B2Publication Date: 2020-11-03
- Inventor: Weng Foong Yap , Jinbang Tang , Sandeep Shantaram
- Applicant: NXP USA, Inc.
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; B81B7/02

Abstract:
Embodiments of a packaged electronic device and method of fabricating such a device are provided, where the packaged electronic device includes: a pressure sensor die having a diaphragm on a front side; an encapsulant material that encapsulates the pressure sensor die, wherein the front side of the pressure sensor die is exposed at a first major surface of the encapsulant material; an interconnect structure formed over the front side of the pressure sensor die and the first major surface of the encapsulant material, wherein an opening through the interconnect structure is generally aligned to the diaphragm; and a cap attached to an outer dielectric layer of the interconnect structure, the cap having a vent hole generally aligned with the opening through the interconnect structure.
Public/Granted literature
- US20190112180A1 PACKAGED PRESSURE SENSOR DEVICE Public/Granted day:2019-04-18
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