Invention Grant
- Patent Title: MEMS sensors with selectively adjusted damping of suspension
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Application No.: US15643174Application Date: 2017-07-06
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Publication No.: US10822225B2Publication Date: 2020-11-03
- Inventor: Mikulas Jandak , Michael Schneider , Ulrich Schmid
- Applicant: Honeywell International Inc.
- Applicant Address: US NC Charlotte
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NC Charlotte
- Agency: Fogg & Powers LLC
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; H01L41/113 ; H01L29/84

Abstract:
A micro-electro-mechanical systems (MEMS) device and method of fabricating the MEMS device are disclosed. The MEMS device comprises a substrate, one or more suspension structures connected to the substrate, one or more metallized layers on the one or more suspension structures, and one or more sense structures connected to the one or more suspension structures. The one or more metallized layers provide selectively adjusted damping of the one or more suspension structures.
Public/Granted literature
- US20180179049A1 MEMS SENSORS WITH SELECTIVELY ADJUSTED DAMPING OF SUSPENSION Public/Granted day:2018-06-28
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