Invention Grant
- Patent Title: Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films
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Application No.: US15883815Application Date: 2018-01-30
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Publication No.: US10822458B2Publication Date: 2020-11-03
- Inventor: Manchao Xiao , Matthew R. MacDonald , Xinjian Lei , Meiliang Wang
- Applicant: Versum Materials US, LLC
- Applicant Address: US AZ Tempe
- Assignee: Versum Materials US, LLC
- Current Assignee: Versum Materials US, LLC
- Current Assignee Address: US AZ Tempe
- Agent David K. Benson; Joseph D. Rossi
- Main IPC: C08G77/26
- IPC: C08G77/26 ; C23C16/455 ; C08G77/06 ; C07F7/18 ; C23C16/40 ; C07F7/10 ; C07F7/21 ; C08L83/08 ; C08G77/04
Abstract:
Amino-functionalized linear and cyclic oligosiloxanes, which have at least two silicon and two oxygen atoms as well as an organoamino group and methods for making the oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-functionalized linear and cyclic oligosiloxanes are also disclosed.
Public/Granted literature
- US20180223047A1 Organoamino-Functionalized Linear And Cyclic Oligosiloxanes For Deposition Of Silicon-Containing Films Public/Granted day:2018-08-09
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