Invention Grant
- Patent Title: Aqueous compositions of low dishing silica particles for polysilicon polishing
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Application No.: US15842361Application Date: 2017-12-14
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Publication No.: US10822524B2Publication Date: 2020-11-03
- Inventor: Naresh Kumar Penta , Matthew Van Hanehem , Kwadwo E. Tettey , Koichi Yoshida , Kyohei Yoshida
- Applicant: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Applicant Address: US DE Newark
- Assignee: ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, I
- Current Assignee: ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, I
- Current Assignee Address: US DE Newark
- Agent Andrew Merriam; John J. Piskorski
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C09K3/14 ; H01L21/3105

Abstract:
The present invention provides aqueous chemical mechanical planarization (CMP) polishing compositions that comprise a mixture of (a) one or more alkoxylated diamines having a number average molecular weight (Mn) of from 1,000 to 20,000, or, preferably, from 1000-15000 and having four (poly)alkoxy ether groups each containing from 5 to 100 alkoxy repeat units; (b) from 0.01 to 2 wt. % or, preferably, from 0.1 to 1.5 wt. %, as solids, based on the total weight of the compositions, of one or more aqueous dispersions of elongated, bent or nodular colloidal silica particles, preferably, having a secondary particle size as determined by dynamic light scattering (DLS) of from 20 to 60 nm; and (c) ammonia or an amine base, wherein the compositions have a pH ranging from 9 to 11. The compositions are substantially free of metals, such as alkali or alkaline earth metals that can damage substrates in polishing.
Public/Granted literature
- US20190185714A1 AQUEOUS COMPOSITIONS OF LOW DISHING SILICA PARTICLES FOR POLYSILICON POLISHING Public/Granted day:2019-06-20
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