Optical position measuring device
Abstract:
In an optical position measuring device for the interferential determination of the relative distance of two objects which are movable relative to each other in at least one measuring direction, a bundle of rays emitted by a light source is split up into at least two partial bundles of rays, which fall on a grating or a plurality of gratings on separate optical paths and undergo distance-dependent phase shifts as a result. The partial bundles of rays are superpositioned at a mixing grating, whereupon at least three pairs of interfering partial bundles of rays propagate in different directions in space. Via the mixing grating, each pair of interfering partial bundles of rays is focused on a detector element so that at least three position-dependent, phase-shifted incremental signals are detectable via the detector elements.
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