Invention Grant
- Patent Title: Physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle
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Application No.: US15927554Application Date: 2018-03-21
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Publication No.: US10823570B2Publication Date: 2020-11-03
- Inventor: Kei Kanemoto , Makoto Furuhata
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4a9e94ae
- Main IPC: G01C19/5747
- IPC: G01C19/5747 ; G01P15/125 ; G01C19/5769 ; G01P15/08
Abstract:
A physical quantity sensor includes: a base substrate; a first wiring portion that is fixed to the base substrate; a second wiring portion that is fixed to the base substrate and has at least a part disposed in parallel to the first wiring portion; and an electrode portion that is disposed in the base substrate and has a reference potential. The electrode portion is disposed between the base substrate, and the first and second wiring portions. At least parts of the first and second wiring portions overlap the electrode portion in a plan view.
Public/Granted literature
- US20180283868A1 PHYSICAL QUANTITY SENSOR, PHYSICAL QUANTITY SENSOR DEVICE, ELECTRONIC APPARATUS, AND VEHICLE Public/Granted day:2018-10-04
Information query
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