Invention Grant
- Patent Title: Microscope, observation method, and a storage medium
-
Application No.: US15991534Application Date: 2018-05-29
-
Publication No.: US10823675B2Publication Date: 2020-11-03
- Inventor: Chieko Nakada , Kumiko Matsui , Wataru Tomosugi
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Main IPC: G01N21/64
- IPC: G01N21/64 ; G02B21/16 ; G02B21/08 ; G02B21/12 ; G02B21/06 ; H04N5/225

Abstract:
A microscope, including: an illumination optical system that irradiates a specimen with illumination light from an oblique direction; an observation optical system including an objective lens; and a controller that moves at least one of a stage to hold the specimen and the objective lens in a same direction as an optical axis of the objective lens. The controller changes, when moving at least one of the stage and the objective lens, an incident angle of the illumination light with respect to the specimen.
Public/Granted literature
- US20180306721A1 MICROSCOPE, OBSERVATION METHOD, AND A STORAGE MEDIUM Public/Granted day:2018-10-25
Information query