Invention Grant
- Patent Title: Scanning acoustic microscopy system and method
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Application No.: US16057570Application Date: 2018-08-07
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Publication No.: US10823710B2Publication Date: 2020-11-03
- Inventor: Dat Tan Nguyen , Robert Milotta
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Ronald O. Neerings; Charles A. Brill; Frank D. Cimino
- Main IPC: G01N29/28
- IPC: G01N29/28 ; G01N29/06 ; G01N29/44

Abstract:
A system for scanning and analyzing a device wider test includes a transducer. The transducer transmits ultrasonic waves to scan the device under test and determine various properties (e.g., material of layers). The system further includes a heating/cooling portion. The heating/cooling portion conducts thermal stress testing on the device under test to accentuate areas of delamination between layers. The transducer then performs scans on the device under test to locate areas of delamination.
Public/Granted literature
- US20180372694A1 Scanning Acoustic Microscopy System and Method Public/Granted day:2018-12-27
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