Invention Grant
- Patent Title: Plasma source with lamp house correction
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Application No.: US16165842Application Date: 2018-10-19
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Publication No.: US10823943B2Publication Date: 2020-11-03
- Inventor: Shiyu Zhang , Ilya Bezel
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G02B17/08
- IPC: G02B17/08 ; G03F7/20 ; G01N21/88 ; G01N21/21

Abstract:
A plasma light source with lamp house correction is disclosed. The system may include a pump source configured to generate pump illumination. The pump illumination may be directed, by an elliptical reflector element, to a volume of gas contained within a plasma lamp in order to generate a plasma. The plasma may be configured to generate broadband illumination. The system may also include a correction plate and/or an aspherical elliptical reflector element configured to alter the pump illumination to correct for aberrations introduced by the plasma lamp. The system may also include an additional aspherical correction plate configured to alter the broadband illumination to correct for aberrations introduced by optical elements of the system.
Public/Granted literature
- US20200041774A1 Plasma Source with Lamp House Correction Public/Granted day:2020-02-06
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |