Invention Grant
- Patent Title: Directed self-assembly of block copolymers
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Application No.: US16000145Application Date: 2018-06-05
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Publication No.: US10825683B2Publication Date: 2020-11-03
- Inventor: Jan Doise
- Applicant: IMEC VZW , Katholieke Universiteit Leuven, KU LEUVEN R&D
- Applicant Address: BE Leuven BE Leuven
- Assignee: IMEC VZW,Katholieke Universiteit Leuven, KU LEUVEN R&D
- Current Assignee: IMEC VZW,Katholieke Universiteit Leuven, KU LEUVEN R&D
- Current Assignee Address: BE Leuven BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L21/027 ; H01L21/02 ; C30B25/18 ; H01L21/768 ; B81C1/00 ; G03F7/00 ; C30B29/06 ; H01L21/033 ; H01L21/308

Abstract:
A method for directing a self-assembly of a block copolymer comprising a first and a second block is provided. The method including: providing a substrate comprising at least one concavity therein, the concavity comprising at least a sidewall and a bottom, the bottom having a preferential wetting affinity for the second block with respect to the first block; grafting a first grafting material onto the sidewall, selectively with respect to the bottom, the first grafting material having a preferential wetting affinity for the first block with respect to the second block; grafting a second grafting material onto the bottom and optionally onto the sidewall, the second grafting material having a preferential wetting affinity towards the first block with respect to the second block; and providing the block copolymer on the substrate, at least within the at least one concavity.
Public/Granted literature
- US20180358223A1 Directed Self-Assembly of Block Copolymers Public/Granted day:2018-12-13
Information query
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