Invention Grant
- Patent Title: Standby port and substrate processing apparatus having the same
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Application No.: US16224891Application Date: 2018-12-19
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Publication No.: US10825699B2Publication Date: 2020-11-03
- Inventor: Buyoung Jung , Jonghan Kim , Young Jin Jang , Jin Tack Yu , Youngjun Choi , Daehun Kim , Byungsun Bang , Jonghyeon Woo , Heehwan Kim , Cheol-Yong Shin , Gui Su Park
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-Do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Li & Cai Intellectual Property (USA) Office
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@40607fc6
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/683
Abstract:
Disclosed are a standby port and a substrate processing apparatus having the same. The standby port exhausts fumes generated when a processing liquid is discharged into the standby port before the supply of the processing liquid onto a substrate, thereby preventing pollution of a chamber atmosphere.
Public/Granted literature
- US20190189471A1 STANDBY PORT AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME Public/Granted day:2019-06-20
Information query
IPC分类:
