Invention Grant
- Patent Title: Nanosheet with selective dipole diffusion into high-k
-
Application No.: US16518100Application Date: 2019-07-22
-
Publication No.: US10825736B1Publication Date: 2020-11-03
- Inventor: Jingyun Zhang , Takashi Ando , Choonghyun Lee , Alexander Reznicek
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/02 ; H01L21/8234 ; H01L29/40 ; H01L21/225 ; H01L29/10 ; H01L21/3115 ; H01L29/06 ; H01L21/762 ; H01L21/3065 ; H01L29/08 ; H01L27/088 ; H01L29/66

Abstract:
A method is presented for attaining different gate threshold voltages across a plurality of field effect transistor (FET) devices without patterning between nanosheet channels. The method includes forming a first set of nanosheet stacks having a first intersheet spacing, forming a second set of nanosheet stacks having a second intersheet spacing, where the first intersheet spacing is greater than the second intersheet spacing, depositing a high-k (HK) layer within the first and second nanosheet stacks, depositing a material stack that, when annealed, creates an amorphous HK layer in the first set of nanosheet stacks and a crystallized HK layer in the second nanosheet stacks, depositing a dipole material, and selectively diffusing the dipole material into the amorphous HK layer of the first set of nanosheet stacks to provide the different gate threshold voltages for the plurality of FET devices.
Information query
IPC分类: