Invention Grant
- Patent Title: Methods of forming single diffusion breaks on integrated circuit products comprised of FinFET devices and the resulting products
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Application No.: US16196413Application Date: 2018-11-20
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Publication No.: US10825741B2Publication Date: 2020-11-03
- Inventor: Hui Zang , Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L29/66 ; H01L29/78 ; H01L21/762 ; H01L27/092

Abstract:
One illustrative IC product disclosed herein includes an isolation structure that separates a fin into a first fin portion and a second fin portion, an epi semiconductor material positioned on the first fin portion in a source/drain region of a transistor device, wherein a lateral gap is present between a first sidewall of the epi semiconductor material and a second sidewall of the SDB isolation structure, and a conductive source/drain structure that is conductively coupled to the epi semiconductor material, wherein a gap portion of the conductive source/drain structure is positioned in the gap and physically contacts the first sidewall and the second sidewall.
Public/Granted literature
Information query
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