Invention Grant
- Patent Title: Metal bonding pads for packaging applications
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Application No.: US16429259Application Date: 2019-06-03
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Publication No.: US10825792B2Publication Date: 2020-11-03
- Inventor: Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent JoAnn Crockatt
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/065 ; H01L25/00

Abstract:
Methods and semiconductor devices for bonding a first semiconductor device to a second semiconductor device include forming metal pads including a textured microstructure having a columnar grain structure at substantially the same angular direction from the top surface to the bottom surface. The textured crystalline microstructures enables the use of low temperatures and low pressures to effect bonding of the metal pads. Also described are methods of packaging and semiconductor devices.
Public/Granted literature
- US20190304948A1 METAL BONDING PADS FOR PACKAGING APPLICATIONS Public/Granted day:2019-10-03
Information query
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