Invention Grant
- Patent Title: Semiconductor image sensor device with deep trench isolations and method for manufacturing the same
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Application No.: US15937210Application Date: 2018-03-27
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Publication No.: US10825853B2Publication Date: 2020-11-03
- Inventor: Yen-Ting Chiang , Chun-Yuan Chen , Hsiao-Hui Tseng , Sheng-Chan Li , Yu-Jen Wang , Wei Chuang Wu , Shyh-Fann Ting , Jen-Cheng Liu , Dun-Nian Yaung
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A semiconductor image sensor device includes a semiconductor substrate, a radiation-sensing region, and a first isolation structure. The radiation-sensing region is in the semiconductor substrate. The first isolation structure is in the semiconductor substrate and adjacent to the radiation-sensing region. The first isolation structure includes a bottom isolation portion in the semiconductor substrate, an upper isolation portion in the semiconductor substrate, and a diffusion barrier layer surrounding a sidewall of the upper isolation portion.
Public/Granted literature
- US20190139997A1 SEMICONDUCTOR IMAGE SENSOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2019-05-09
Information query
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