Invention Grant
- Patent Title: Display device and manufacturing method thereof
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Application No.: US16203784Application Date: 2018-11-29
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Publication No.: US10826026B2Publication Date: 2020-11-03
- Inventor: Myoung Geun Cha , Sang Gun Choi , Joon Woo Bae , Ji Yeong Shin , Yong Su Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@63c2454f
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L27/32 ; H01L21/308 ; H01L51/52

Abstract:
A method for manufacturing a display device including forming a lower electrode on a substrate; depositing a first insulation layer thereon; forming a semiconductor layer that overlaps the lower electrode thereon; depositing a second insulation layer thereon; forming a gate electrode and an etching prevention layer that overlap the semiconductor layer thereon; depositing a third insulation layer thereon; forming a first conductor that overlaps the gate electrode thereon; depositing a fourth insulation layer thereon; forming a photosensitive film patterns thereon by depositing a photosensitive film and exposing and developing the photosensitive film such that portions of the photosensitive film are removed in a first area, a second area, and a third area; etching the third insulation layer using the patterns as an etching mask; etching the etching prevention layer by using the patterns as an etching mask; and etching the first insulation layer using the patterns as an etching mask.
Public/Granted literature
- US20190326560A1 DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2019-10-24
Information query
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