Invention Grant
- Patent Title: Method for scanning multilayer material using magnetism and apparatus using the same
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Application No.: US15870565Application Date: 2018-01-12
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Publication No.: US10830733B2Publication Date: 2020-11-10
- Inventor: Hyo-Bong Hong , Jae Chan Jeong , Seung-Min Choi , Chang-Beom Kim
- Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@36c1431c
- Main IPC: G01N27/72
- IPC: G01N27/72 ; G01N33/02 ; G01N33/10 ; G01N27/90 ; G01N27/82

Abstract:
Disclosed herein are a method and apparatus for scanning a multilayer material using magnetism. The apparatus for scanning a multilayer material includes at least one measurement head for exciting a mixed magnetic field on a multilayer specimen using at least one excitation solenoid coil and detecting detection signals from the multilayer specimen using a detection solenoid coil, a movement controller for moving any one of the at least one measurement head and a stage on which the multilayer specimen is placed in order to detect detection signals for all parts of the multilayer specimen, and a signal controller for generating two excitation signals having different frequencies in order to generate the mixed magnetic field and for generating a scanning result for the multilayer specimen by collecting the detection signals.
Public/Granted literature
- US20180202973A1 METHOD FOR SCANNING MULTILAYER MATERIAL USING MAGNETISM AND APPARATUS USING THE SAME Public/Granted day:2018-07-19
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