- Patent Title: Capacitance extraction method for semiconductor SADP metal wires
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Application No.: US16130693Application Date: 2018-09-13
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Publication No.: US10831974B2Publication Date: 2020-11-10
- Inventor: Ning Lu , Calvin Bittner
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Steven Meyers, Esq.
- Main IPC: G06F30/398
- IPC: G06F30/398 ; G03F1/70 ; G06F30/367 ; G06F30/394 ; G06F119/10

Abstract:
A system, method and computer program product for extracting integrated circuit on-chip parasitic capacitance in semiconductor structures including structures formed according to a Self-Aligned Double Patterning (SADP) semiconductor manufacturing process. A method of calculating the capacitance of a conductive signal wire in a SADP layer whose adjacent wires or groups of wires are floating (not connected to a circuit or net and not signal carrying). Further, there is provided a system running an iterative method for accurately and efficiently eliminating a group of floating metals by eliminating one floating metal wire per iteration while extracting its corresponding on-chip parasitic coupling capacitance effect. Further, system and methods calculate parasitic capacitance calculation for an “isolated” wire(s) or a “semi-isolated wire” resulting from employing a Self-Aligned Double Patterning (SADP) processing technique. The system and method provides a capacitance calculation and circuit simulation solution without involving use of and without computing a capacitance matrix.
Public/Granted literature
- US20200089836A1 CAPACITANCE EXTRACTION METHOD FOR SEMICONDUCTOR SADP METAL WIRES Public/Granted day:2020-03-19
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