Invention Grant
- Patent Title: Semiconductor product testing device using an electric static carrier
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Application No.: US16086612Application Date: 2018-02-08
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Publication No.: US10832932B2Publication Date: 2020-11-10
- Inventor: Hsiu Hui Yeh
- Applicant: Hsiu Hui Yeh
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@201b67f6
- International Application: PCT/CN2018/075792 WO 20180208
- International Announcement: WO2018/157718 WO 20180907
- Main IPC: H01L21/683
- IPC: H01L21/683 ; G01R31/26 ; H01L21/67 ; H01L21/687

Abstract:
A semiconductor product testing device using an electric static carrier includes a movable carrier plate serving to carry at least one semiconductor product for transferring or testing process; the movable carrier plate being arranged with at least one electric static circuit to suck the at least one semiconductor product; a movable detecting probe set including: a probe set includes at one probe or a plurality of probes; a robot being connected to the probe set for deriving the probe set to a predetermined test position; a control device connected to the robot and including a control circuit for controlling movements of the robot and a testing circuit; and a computer connected to the control device for getting testing data from the testing circuit; the computer providing functions to cause the user to determine test items and ways of the testing circuit and the moving paths of the robot.
Public/Granted literature
- US20190378743A1 SEMICONDUCTOR PRODUCT TESTING DEVICE USING AN ELECTRIC STATIC CARRIER Public/Granted day:2019-12-12
Information query
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