• Patent Title: Semiconductor product testing device using an electric static carrier
  • Application No.: US16086612
    Application Date: 2018-02-08
  • Publication No.: US10832932B2
    Publication Date: 2020-11-10
  • Inventor: Hsiu Hui Yeh
  • Applicant: Hsiu Hui Yeh
  • Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@201b67f6
  • International Application: PCT/CN2018/075792 WO 20180208
  • International Announcement: WO2018/157718 WO 20180907
  • Main IPC: H01L21/683
  • IPC: H01L21/683 G01R31/26 H01L21/67 H01L21/687
Semiconductor product testing device using an electric static carrier
Abstract:
A semiconductor product testing device using an electric static carrier includes a movable carrier plate serving to carry at least one semiconductor product for transferring or testing process; the movable carrier plate being arranged with at least one electric static circuit to suck the at least one semiconductor product; a movable detecting probe set including: a probe set includes at one probe or a plurality of probes; a robot being connected to the probe set for deriving the probe set to a predetermined test position; a control device connected to the robot and including a control circuit for controlling movements of the robot and a testing circuit; and a computer connected to the control device for getting testing data from the testing circuit; the computer providing functions to cause the user to determine test items and ways of the testing circuit and the moving paths of the robot.
Information query
Patent Agency Ranking
0/0