Invention Grant
- Patent Title: Semiconductor device with transistor local interconnects
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Application No.: US16502521Application Date: 2019-07-03
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Publication No.: US10833018B2Publication Date: 2020-11-10
- Inventor: Mahbub Rashed , Irene Y. Lin , Steven Soss , Jeff Kim , Chinh Nguyen , Marc Tarabbia , Scott Johnson , Subramani Kengeri , Suresh Venkatesan
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L21/8234 ; H01L27/02 ; H01L21/768 ; H01L21/285 ; H01L21/8238 ; H01L23/532 ; H01L27/092 ; H01L29/08 ; H01L27/118

Abstract:
A semiconductor device includes a substrate with first and second transistors disposed thereon and including sources, drains, and gates, wherein the first and second gates extend longitudinally as part of linear strips that are parallel to and spaced apart. The device further includes a first CB layer forming a local interconnect electrically connected to the first gate, a second CB layer forming a local interconnect electrically connected to the second gate, and a CA layer forming a local interconnect extending longitudinally between first and second ends of the CA layer. The first and second CB layers and the CA layer are disposed between a first metal layer and the substrate. The first metal layer is disposed above each source, drain, and gate of the transistors, The CA layer extends parallel to the first and second linear strips and is substantially perpendicular to the first and second CB layers.
Public/Granted literature
- US20190326219A1 SEMICONDUCTOR DEVICE WITH TRANSISTOR LOCAL INTERCONNECTS Public/Granted day:2019-10-24
Information query
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