Invention Grant
- Patent Title: Hybrid bonding using dummy bonding contacts
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Application No.: US16292277Application Date: 2019-03-04
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Publication No.: US10833042B2Publication Date: 2020-11-10
- Inventor: Tao Wang , Si Ping Hu , Jia Wen Wang , Shi Qi Huang , Jifeng Zhu , Jun Chen , Zi Qun Hua
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/00 ; H01L27/11568 ; H01L21/768 ; H01L25/00 ; H01L27/11573 ; H01L25/18 ; H01L27/11582 ; H01L23/528

Abstract:
Embodiments of bonded semiconductor structures and fabrication methods thereof are disclosed. In an example, a semiconductor device includes a first and a second semiconductor structures. The first semiconductor structure includes a first interconnect layer including first interconnects. The first semiconductor structure further includes a first bonding layer including first bonding contacts. Each first interconnect is in contact with a respective first bonding contact. The second semiconductor structure includes a second interconnect layer including second interconnects. The second semiconductor structure further includes a second bonding layer including second bonding contacts. At least one second bonding contact is in contact with a respective second interconnect. At least another second bonding contact is separated from the second interconnects. The semiconductor device further includes a bonding interface between the first and second bonding layers. Each first bonding contact is in contact with one of the second bonding contacts at the bonding interface.
Public/Granted literature
- US11049834B2 Hybrid bonding using dummy bonding contacts Public/Granted day:2021-06-29
Information query
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