Invention Grant
- Patent Title: Buried conductive layer supplying digital circuits
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Application No.: US16192992Application Date: 2018-11-16
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Publication No.: US10833089B2Publication Date: 2020-11-10
- Inventor: Juergen Pille , Albert Frisch , Tobias Werner , Rolf Sautter , Dieter Wendel
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent L. Jeffrey Kelly
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/088 ; H01L29/78 ; H01L23/528 ; H01L29/10 ; H01L27/02 ; H01L29/06 ; H01L21/822 ; H01L21/8234 ; H01L23/522 ; H01L29/423

Abstract:
An embodiment may include a method of forming an integrated circuit. The method may include forming a first pair of transistors stacked vertically above a semiconductor substrate arranged substantially perpendicular to the plurality of layers. Each of the first pair of vertically stacked transistors are of the same type and are connected in series. The method may include forming a second pair of transistors connected in parallel and arranged substantially perpendicular to the plurality of layers. The second pair of transistors are a different type than the first pair of vertically stacked transistors. The method may include forming a power supply rail within the semiconductor substrate and arranged at one end of the first pair of vertically stacked transistors.
Public/Granted literature
- US20200161312A1 BURIED CONDUCTIVE LAYER SUPPLYING DIGITAL CIRCUITS Public/Granted day:2020-05-21
Information query
IPC分类: