Invention Grant
- Patent Title: Low power 2D memory transistor for flexible electronics and the fabrication methods thereof
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Application No.: US16356067Application Date: 2019-03-18
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Publication No.: US10833102B2Publication Date: 2020-11-10
- Inventor: Koon Hoo Teo , Pin-Chun Shen , Chungwei Lin
- Applicant: Mitsubishi Electric Research Laboratories, Inc.
- Applicant Address: US MA Cambridge
- Assignee: Mitsubishi Electric Research Laboratories, Inc.
- Current Assignee: Mitsubishi Electric Research Laboratories, Inc.
- Current Assignee Address: US MA Cambridge
- Agent Gennadiy Vinokur; James McAleenan; Hironori Tsukamoto
- Main IPC: G11C11/22
- IPC: G11C11/22 ; G11C14/00 ; G06F12/02 ; H01L27/11597 ; H01L27/11502 ; H01L27/11585

Abstract:
Devices and methods of a transistor device that include a flexible memory cell. The flexible memory cell having a gate stack with sidewalls provided over a substrate. The gate stack including a metal gate layer provided over the substrate. A buffer layer provided over the metal gate layer. A ferroelectric layer provided over the buffer layer. A dielectric layer provided over the ferroelectric layer. Further, a two-dimensional (2D) material layer provided over a portion of a top surface of the dielectric layer. Source and drain regions provided on separate portions of the top surface of the dielectric layer so as to create a cavity that the 2D material layer are located.
Public/Granted literature
- US20200303417A1 Low Power 2D Memory Transistor for Flexible Electronics and the Fabrication Methods Thereof Public/Granted day:2020-09-24
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