Low power 2D memory transistor for flexible electronics and the fabrication methods thereof
Abstract:
Devices and methods of a transistor device that include a flexible memory cell. The flexible memory cell having a gate stack with sidewalls provided over a substrate. The gate stack including a metal gate layer provided over the substrate. A buffer layer provided over the metal gate layer. A ferroelectric layer provided over the buffer layer. A dielectric layer provided over the ferroelectric layer. Further, a two-dimensional (2D) material layer provided over a portion of a top surface of the dielectric layer. Source and drain regions provided on separate portions of the top surface of the dielectric layer so as to create a cavity that the 2D material layer are located.
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