Invention Grant
- Patent Title: Semiconductor device and method
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Application No.: US16253321Application Date: 2019-01-22
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Publication No.: US10833161B2Publication Date: 2020-11-10
- Inventor: Syed Muhammad Yasser Sherazi , Julien Ryckaert , Juergen Boemmels , Guillaume Bouche
- Applicant: IMEC VZW , GLOBALFOUNDRIES INC.
- Applicant Address: BE Leuven KY George Town
- Assignee: IMEC VZW,GLOBALFOUNDRIES INC.
- Current Assignee: IMEC VZW,GLOBALFOUNDRIES INC.
- Current Assignee Address: BE Leuven KY George Town
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1bb8b5fb
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/78 ; H01L21/311 ; H01L21/768 ; H01L21/8234 ; H01L27/088 ; H01L23/522 ; H01L29/08 ; H01L29/66

Abstract:
A semiconductor device includes: (i) a substrate; (ii) a first elongated semiconductor structure extending in a first horizontal direction along the substrate and protruding vertically above the substrate, wherein a first set of source/drain regions are formed on the first semiconductor structure; (iii) a second elongated semiconductor structure extending along the substrate in parallel to the first semiconductor structure and protruding vertically above the substrate, wherein a second set of source/drain regions are formed on the second semiconductor structure; and (iv) a first set of source/drain contacts formed on the first set of source/drain regions, wherein a first source/drain contact of the first set of source/drain contacts includes: (a) a vertically extending contact portion formed directly above a first source/drain region of the first set of source/drain regions, and (b) a via landing portion protruding horizontally from the vertically extending contact portion in a direction towards the second semiconductor structure.
Public/Granted literature
- US20190229196A1 Semiconductor Device and Method Public/Granted day:2019-07-25
Information query
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