Invention Grant
- Patent Title: Silicon carbide crystal and method for manufacturing the same
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Application No.: US15941129Application Date: 2018-03-30
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Publication No.: US10851470B2Publication Date: 2020-12-01
- Inventor: Ching-Shan Lin , Jian-Hsin Lu , Chien-Cheng Liou , Man-Hsuan Lin
- Applicant: GlobalWafers Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: GLOBALWAFERS CO., LTD.
- Current Assignee: GLOBALWAFERS CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Li & Cai Intellectual Property (USA) Office
- Priority: TW106134548A 20171006
- Main IPC: C30B29/36
- IPC: C30B29/36 ; C30B23/02 ; H01L29/16 ; H01L29/36 ; C30B23/00 ; H01L29/32 ; H01L21/02 ; C30B25/02

Abstract:
A silicon carbide crystal and a method for manufacturing the same are disclosed. The silicon carbide crystal includes a seed layer, a bulk layer, and a stress buffering structure formed between the seed layer and the bulk layer. The seed layer, the bulk layer, and the stress buffering structure are each formed with a dopant that cycles between high and low concentration. Therefore, the crystal defects can be significantly reduced.
Public/Granted literature
- US20190106807A1 SILICON CARBIDE CRYSTAL AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2019-04-11
Information query
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