Invention Grant
- Patent Title: Flow control valve and mass flow controller using the same
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Application No.: US16324747Application Date: 2017-09-29
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Publication No.: US10851898B2Publication Date: 2020-12-01
- Inventor: Ryu Sasaki , Ryouichi Iwayoshi
- Applicant: HITACHI METALS, LTD.
- Applicant Address: JP Tokyo
- Assignee: HITACHI METALS, LTD.
- Current Assignee: HITACHI METALS, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Neugeboren O'Dowd PC
- Priority: JP2016-191249 20160929
- International Application: PCT/JP2017/035574 WO 20170929
- International Announcement: WO2018/062516 WO 20180405
- Main IPC: F16K7/16
- IPC: F16K7/16 ; F16K1/42

Abstract:
In a flow control valve which comprises a valve seat comprising an inner cylindrical part with a contact surface formed in its upper end part and an outer cylindrical part higher than the inner cylindrical member and a valve body that carries out an opening and closing action in a direction perpendicular to the contact surface of the valve seat, an inner cylindrical member and an outer cylindrical member, which are separate members, are airtightly fitted with each other to constitute the inner cylindrical part and the outer cylindrical part. As a result, by processing the contact surface of the inner cylindrical part to be smooth, the flow control valve can control flow rate of gas in a small flow rate range more accurately than before.
Public/Granted literature
- US20190195372A1 FLOW CONTROL VALVE AND MASS FLOW CONTROLLER USING THE SAME Public/Granted day:2019-06-27
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