Invention Grant
- Patent Title: Shape measuring apparatus
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Application No.: US14184132Application Date: 2014-02-19
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Publication No.: US10852128B2Publication Date: 2020-12-01
- Inventor: Masaoki Yamagata , Kentaro Nemoto , Eisuke Moriuchi , Tadashi Iwamoto
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2013-032094 20130221
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01B11/25 ; G01B11/00

Abstract:
A shape measuring apparatus includes a first light source, a second light source, an optical system, an image capturer, and a controller. The first light source emits visible light. The second light source emits measurement light used in a measurement. The optical system emits the visible light and the measurement light at the same position on a work piece. The image capturer captures an image of the measurement light reflected by the work piece. The controller is configured to cause the emission of the visible light onto the work piece with the first light source when determining a measurement position, and to control the emission of the measurement light onto the work piece with the second light source when making the measurement.
Public/Granted literature
- US20140232855A1 SHAPE MEASURING APPARATUS Public/Granted day:2014-08-21
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