Invention Grant
- Patent Title: Apparatus for and method of sensing fluorine concentration
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Application No.: US16266501Application Date: 2019-02-04
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Publication No.: US10852227B2Publication Date: 2020-12-01
- Inventor: Thomas Patrick Duffey
- Applicant: Cymer, LLC
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino McGovern IP Group LLC
- Main IPC: G01N21/17
- IPC: G01N21/17 ; G01N29/24 ; G01N21/31
Abstract:
Disclosed is an apparatus for and method of measuring the concentration of F2 in the laser gas used in an excimer laser. Quartz Enhanced Photoacoustic Spectroscopy is used to obtain a direct measurement of F2 concentration quickly and using only a small sample volume.
Public/Granted literature
- US20190170635A1 APPARATUS FOR AND METHOD OF SENSING FLUORINE CONCENTRATION Public/Granted day:2019-06-06
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