Invention Grant
- Patent Title: Techniques to combine two integrated photonic substrates
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Application No.: US14926868Application Date: 2015-10-29
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Publication No.: US10852492B1Publication Date: 2020-12-01
- Inventor: Diedrik Vermeulen , Christopher Doerr
- Applicant: Acacia Communications, Inc.
- Applicant Address: US MA Maynard
- Assignee: Acacia Communications, Inc.
- Current Assignee: Acacia Communications, Inc.
- Current Assignee Address: US MA Maynard
- Agent Joseph D'Angelo
- Main IPC: G02B6/42
- IPC: G02B6/42 ; G02B6/125 ; G02B6/12

Abstract:
Structures and methods for passively aligning a photonic die with a receiving substrate are described. Three alignment surfaces, having dimensions greater than a desired alignment accuracy, may be formed on the photonic die and used to passively and accurately align the photonic die to a receiving substrate in six degrees of freedom. Two of the three alignment surfaces on the photonic die may be formed in a single mask-and-etch process, while the third alignment surface may require no patterning or etching. Three complementary alignment surfaces on the receiving substrate may be formed in a single mask-and-etch process.
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