Invention Grant
- Patent Title: Confocal imaging of an object utilising a pinhole array
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Application No.: US15365066Application Date: 2016-11-30
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Publication No.: US10852519B2Publication Date: 2020-12-01
- Inventor: Wui Fung Sze , Jiangwen Deng
- Applicant: ASM Technology Singapore Pte Ltd
- Applicant Address: SG Singapore
- Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: G02B21/00
- IPC: G02B21/00 ; H04N5/372

Abstract:
A confocal imaging apparatus for inspecting an object comprises a light source operative to project light to illuminate the object, and an imaging device for receiving light reflected from the object along a lighting path located between the object and the imaging device. A pinhole array comprising a plurality of pinholes is positioned along the lighting path such that light reflected from the object is passed through the pinhole array. A mechanism is operative to move the pinhole array along a single axis in a linear direction transverse to the light path for transmitting an image corresponding to a substantially contiguous area of the object onto the imaging device.
Public/Granted literature
- US20180149848A1 CONFOCAL IMAGING OF AN OBJECT UTILISING A PINHOLE ARRAY Public/Granted day:2018-05-31
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