Invention Grant
- Patent Title: Mirror driving apparatus and method for manufacturing thereof
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Application No.: US16065862Application Date: 2016-12-13
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Publication No.: US10852529B2Publication Date: 2020-12-01
- Inventor: Takahiko Ito , Nobuaki Konno , Yoshiaki Hirata , Yukihisa Yoshida
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Xsensus LLP
- Priority: JP2016-028031 20160217
- International Application: PCT/JP2016/086986 WO 20161213
- International Announcement: WO2017/141529 WO 20170824
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; G02B26/12 ; B81B3/00 ; G02B6/35

Abstract:
In a mirror driving apparatus, a pair of beam portions includes: a pair of first beams directly adjacent to a reflector to sandwich the reflector between the first beams; and a pair of second beams each coupled to one side of a corresponding one of the first beams, the one side being opposite to the reflector with respect to the corresponding one of the first beams. A plurality of electrodes are spaced from each other on a main surface of each of the first beams, a piezoelectric material being interposed between the main surface and the plurality of electrodes. The first beams are displaceable crosswise to the main surface in respective directions opposite to each other. The pair of second beams is displaceable in a direction connecting the first beams and the second beams, along the main surface of the second beams.
Public/Granted literature
- US20200081243A1 MIRROR DRIVING APPARATUS AND METHOD FOR MANUFACTURING THEREOF Public/Granted day:2020-03-12
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