Invention Grant
- Patent Title: Optical diffraction component for suppressing at least one target wavelength by destructive interference
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Application No.: US16739320Application Date: 2020-01-10
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Publication No.: US10852640B2Publication Date: 2020-12-01
- Inventor: Heiko Feldmann , Valentin Bolsinger , William Peter Van Drent , Jozef Petrus Henricus Benschop
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102019200376 20190115; DE102019210450 20190716
- Main IPC: G02B5/18
- IPC: G02B5/18 ; G03F7/20

Abstract:
An optical diffraction component is configured to suppress at least one target wavelength by destructive interference. The optical diffraction component includes at least three diffraction structure levels that are assignable to at least two diffraction structure groups. A first of the diffraction structure groups is configured to suppress a first target wavelength λ1. A second of the diffraction structure groups is configured to suppress a second target wavelength λ2, where (λ1−λ2)2/(λ1+λ2)2
Public/Granted literature
- US20200225586A1 OPTICAL DIFFRACTION COMPONENT FOR SUPPRESSING AT LEAST ONE TARGET WAVELENGTH BY DESTRUCTIVE INTERFERENCE Public/Granted day:2020-07-16
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