Invention Grant
- Patent Title: Method of defect detection on a specimen and system thereof
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Application No.: US16249857Application Date: 2019-01-16
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Publication No.: US10853932B2Publication Date: 2020-12-01
- Inventor: Elad Cohen , Denis Simakov
- Applicant: APPLIED MATERIAL ISRAEL, LTD.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIAL ISRAEL, LTD.
- Current Assignee: APPLIED MATERIAL ISRAEL, LTD.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06T7/00
- IPC: G06T7/00

Abstract:
There are provided a system and method of defect detection on a specimen, the method comprising: performing partitioning for each of one or more portions of a first die; receiving one or more noise maps indicative of noise distribution on second images captured for one or more portions of a second die; performing segmentation for each noise map in runtime, the segmentation for a given noise map including: calculating a score for each region, the given noise map aligned with the regions and each region is associated with noise data aligned therein, the score for a given region calculated at least based on the noise data associated therewith; and associating each region with one segmentation label of a predefined set of segmentation labels indicative of noise levels based on the score, thereby obtaining a set of segments each corresponding to one or more regions associated with the same segmentation label.
Public/Granted literature
- US20200226744A1 METHOD OF DEFECT DETECTION ON A SPECIMEN AND SYSTEM THEREOF Public/Granted day:2020-07-16
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