Invention Grant
- Patent Title: Rotary plasma electrical feedthrough
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Application No.: US15614794Application Date: 2017-06-06
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Publication No.: US10854432B2Publication Date: 2020-12-01
- Inventor: Hari K. Ponnekanti
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
The present disclosure generally relates to methods and apparatus for facilitating electrical feedthrough in plasma processing chambers. The apparatus includes an electrically insulating housing positioned on a backside of the substrate support to contain a secondary plasma therein. The secondary plasma facilitates an electrical connection between the substrate support and electrical power or ground located outside the processing chamber. The methods include utilizing a secondary plasma to electrically couple substrate support to and electrical power or ground located outside the processing chamber.
Public/Granted literature
- US20170352558A1 ROTARY PLASMA ELECTRICAL FEEDTHROUGH Public/Granted day:2017-12-07
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