Invention Grant
- Patent Title: Sputtering target of sintered Sb—Te-based alloy
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Application No.: US15102305Application Date: 2015-02-20
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Publication No.: US10854435B2Publication Date: 2020-12-01
- Inventor: Yoshimasa Koido
- Applicant: JX Nippon Mining & Metals Corporation
- Applicant Address: JP Tokyo
- Assignee: JX NIPPON MINING & METALS CORPORATION
- Current Assignee: JX NIPPON MINING & METALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: JP2014-061965 20140325; JP2014-061966 20140325
- International Application: PCT/JP2015/054712 WO 20150220
- International Announcement: WO2015/146394 WO 20151001
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/34 ; C23C14/14 ; C23C14/10 ; C23C14/08 ; C23C14/06 ; B22F9/08 ; B22F9/04 ; B22F3/15 ; C22C28/00 ; C22C12/00 ; C22C1/04

Abstract:
Sb—Te-based alloy sintered sputtering target having a Sb content of 10 to 60 at %, a Te content of 20 to 60 at %, and remainder being one or more types of elements selected from Ag, In, and Ge and unavoidable impurities, wherein an average grain size of oxides is 0.5 μm or less. An object of this invention is to improve the texture of the Sb—Te-based alloy sintered sputtering target in order to prevent the generation of arcing during sputtering and improve the thermal stability of the sputtered film.
Public/Granted literature
- US20160314945A1 SPUTTERING TARGET OF SINTERED Sb-Te-BASED ALLOY Public/Granted day:2016-10-27
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