Invention Grant
- Patent Title: Epitaxies of a chemical compound semiconductor
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Application No.: US16101568Application Date: 2018-08-13
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Publication No.: US10854446B2Publication Date: 2020-12-01
- Inventor: Hung-Wei Yu , Yi Chang , Tsun-Ming Wang
- Applicant: Taiwan Semiconductor Manufacturing Company Limited , National Chiao-Tung University
- Applicant Address: TW Hsinchu TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited,National Chiao-Tung University
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited,National Chiao-Tung University
- Current Assignee Address: TW Hsinchu TW Hsinchu
- Agency: Jones Day
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/10 ; H01L29/205 ; H01L29/778

Abstract:
Methods and structures includes providing a substrate, forming a prelayer over a substrate, forming a barrier layer over the prelayer, and forming a channel layer over the barrier layer. Forming the prelayer may include growing the prelayer at a graded temperature. Forming the barrier layer is such that the barrier layer may include GaAs or InGaAs. Forming the channel layer is such that the channel layer may include InAs or an Sb-based heterostructure. Thereby structures are formed.
Public/Granted literature
- US20190006173A1 Epitaxies of a Chemical Compound Semiconductor Public/Granted day:2019-01-03
Information query
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