Invention Grant
- Patent Title: Method for the transportation and storage of a semiconductor plate in a hermetic container
-
Application No.: US16330989Application Date: 2017-09-05
-
Publication No.: US10854487B2Publication Date: 2020-12-01
- Inventor: Bernard Pelissier
- Applicant: Centre national de la recherche scientifique , UNIVERSITE GRENOBLE ALPES
- Applicant Address: FR Paris FR Saint Martin d'Heres
- Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,UNIVERSITE GRENOBLE ALPES
- Current Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,UNIVERSITE GRENOBLE ALPES
- Current Assignee Address: FR Paris FR Saint Martin d'Heres
- Agency: Stites & Harbison, PLLC
- Agent B. Aaron Schulman, Esq.
- Priority: FR1658300 20160907
- International Application: PCT/FR2017/052340 WO 20170905
- International Announcement: WO2018/046831 WO 20180315
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677
Abstract:
The invention relates to a method for the transportation and/or storage of at least one semiconductor plate, in which the plate is disposed in a hermetic container (1) filled with hydrogen at a pressure of between 10−1 and 4*103 Pa and, optionally, at least one inert gas, the total pressure in the casing being between 10−1 and 5*104 Pa.
Public/Granted literature
- US20190259644A1 METHOD FOR THE TRANSPORTATION AND STORAGE OF A SEMICONDUCTOR PLATE IN A HERMETIC CONTAINER Public/Granted day:2019-08-22
Information query
IPC分类:
