Invention Grant
- Patent Title: Method for manufacturing a handling device and method for reversible bonding using such a device
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Application No.: US15611413Application Date: 2017-06-01
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Publication No.: US10854493B2Publication Date: 2020-12-01
- Inventor: Pierre Montmeat , Frank Fournel
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: FR1655076 20160603
- Main IPC: H01L21/683
- IPC: H01L21/683

Abstract:
A method for manufacturing a handling device includes depositing a single layer of an adhesive on a first surface of a first wafer; depositing an antiadhesive layer on a first surface of a second wafer different from the first wafer; bringing into contact the first wafer and the second wafer, the bringing into contact taking place at the level of the single adhesive layer of the first wafer and the antiadhesive layer of the second wafer; separating the first wafer and the second wafer; the first wafer including the single adhesive layer forming a handling device. The bringing into contact of the first wafer and the second wafer is carried out at a temperature TC such that TC>Tg+100° C. where Tg is the glass transition temperature of the material composing the single adhesive layer of the first wafer.
Public/Granted literature
- US20170352571A1 Method for manufacturing a handling device and method for reversible bonding using such a device Public/Granted day:2017-12-07
Information query
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