Invention Grant
- Patent Title: Semiconductor device and manufacturing method therefor
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Application No.: US15502244Application Date: 2015-10-02
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Publication No.: US10854543B2Publication Date: 2020-12-01
- Inventor: Shin Takizawa , Takashi Nakano
- Applicant: DENSO CORPORATION
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2014-206425 20141007; JP2015-176741 20150908
- International Application: PCT/JP2015/005036 WO 20151002
- International Announcement: WO2016/056212 WO 20160414
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L27/01 ; H01C7/00 ; H01L27/08 ; H01L27/10 ; H01L49/02 ; H01L23/00

Abstract:
A semiconductor device includes: a substrate; a first wiring layer arranged above the substrate; a first insulating film covering the first wiring layer; a lower oxidation preventing film arranged on the first insulating film; at least one thin-film resistor arranged on the lower oxidation preventing film; an upper oxidation preventing film arranged on the at least one thin-film resistor; a second insulating film covering the lower oxidation preventing film, the at least one thin-film resistor, and the upper oxidation preventing film; a second wiring layer arranged on the second insulating film; and a third insulating film covering the second wiring layer. The first wiring layer overlaps an end portion of the at least one thin-film resistor when viewed in a normal direction of one surface of the substrate.
Public/Granted literature
- US20170256505A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2017-09-07
Information query
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